Mechanical properties and high temperature oxidation resistance of (AlCrTiV)N coatings synthesized by cathodic arc deposition

High entropy alloy nitrides (AlCrTiV)N coatings were deposited by cathodic arc evaporation at various deposition bias and temperature. The mechanical properties of the as-deposited their oxidation resistance after annealing temperatures analysed. X-ray analyses show in all a FCC structure with (111) preferred orientation up to 750 °C. Up 600 °C, no oxygen penetration is measured films while 800 critical spalling occurs for samples. coating temperature 300 °C negative 100 V exhibits most interesting compromise both performances hardness 40 GPa, friction coefficient 0.44 wear rate 5.8 · 10−7 mm3·N−1·m−1. Annealing air 2h reduces 2.1 mm3·N−1·m−1 surface 17 GPa. Although forms thin oxide layer that on coating, it also averages inside film 33 GPa regardless bias.